ASSESMENT OF VACUUM-DEPOSITED LAYER THICKNESS AND UNIFORMITY ON FLAT MOBILE OBJECT SURFACES

Authors

  • Erkin Khaltursunov Associate professor
  • Abdulaziz Nazarov
  • Aleksey Kamardin
  • Bakhrom Igamov
  • Abdulaziz Mavlyanov

Keywords:

vacuum, evaporation, coating, thickness, simulation, deposition, photometric, optical density

Abstract

Calculations of the thickness and uniformity of vacuum coatings deposited on rotating objects such as rotating disks were performed. Based on theoretical and experimental studies using the developed model of mass transfer during deposition on a moving inclined disk, dependences were obtained that relate the thickness and uniformity of the coating to the parameters of the evaporation system.

The authors measured the optical density of metal coatings on glass disks with a diameter of up to 100 mm. Photometric measurements of Cr, Ti, and Cu coatings with a thickness of the order of 40–50 nm showed satisfactory concordance with the calculated uniformity forecasts.

Published

2023-03-03

How to Cite

Khaltursunov, E., Nazarov, A. ., Kamardin, A., Igamov, B., & Mavlyanov, A. . (2023). ASSESMENT OF VACUUM-DEPOSITED LAYER THICKNESS AND UNIFORMITY ON FLAT MOBILE OBJECT SURFACES. Central Asian Journal of STEM, 3(2). Retrieved from https://stem.kiut.uz/index.php/journal/article/view/59

Issue

Vol. 3 No. 2 (2022): Central Asian Journal of STEM

Section

Articles

License

Copyright (c) 2023 Central Asian Journal of STEM

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